Capacitance Sensor Measurement – MTI Instruments

High-Accuracy Capacitance Sensors Made in the US

MTI’s capacitance sensors are essential measurement tools for process automation, quality control, and tool automation control. Used across a wide range of industries, in virtually any application where accuracy is paramount, MTI’s US-made capacitance sensor systems have set the standard for accuracy and reliability for over 50 years.

Learn More


Accumeasure Analog Capacitance System

The Accumeasure 9000 Analog Capacitance System is a cost-effective solution for single and dual channel applications such as thickness measurements and dual axis motion stages feedback control.  View Specs

Request Info
Accumeasure OEM Boards

The Accumeasure MicroCap is a compact, custom designed, OEM capacitance board for high-precision non-contact displacement, thickness and gap measurement.  View Specs

Request Info
Accumeasure Modular Capacitance Rack System

The Accumeasure TM 500 compact multi-channel capacitance rack system accepts up to 6 capacitance amplifiers.The modular design allows customers to populate the rack with their required number of measurement channels for thickness or single-ended displacement measurements. View Specs

Request Info
Photovoltaic/Solar Metrology System

A high-speed, multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials. View Specs

Request Info
Manual Semiconductor Metrology System

The Proforma 300i wafer thickness gauge is a capacitance-based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. View Specs

Request Info
Semi-automated Metrology System

The Proforma 300iSA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials delivering full wafer surface scanning for thickness, thickness variation, bow, warp, sori, site and global flatness. View Specs

Request Info


[contact-form-7 id="3533" title="Landing Page"]

Contact Sales at: 800 342-2203
[email protected]


Below are examples of MTI Instruments’ Capacitance Sensors in use:

Theory of Operation

Get in Touch with Us

Questions about our products, technology or MTI in general? Contact us.


325 Washington Avenue Extension

Albany, NY 12205

Toll-Free: 1-800-342-2203

Tel: 518-218-2550

Fax: 518-218-2506

Request Info