Digital Accumeasure Gen 3
Nanometer accuracy, high precision capacitance measurement sensor offering nanometer accuracy and stability.
The Accumeasure D capacitance displacement sensor series amplifier is a revolutionary design that uses the latest technology to convert a highly reliable capacitive electric field measurement (displacement) directly into a highly precise 24 bit digital reading to accurately measure position, thickness, motion and vibration.
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Product Info | Technical Specifications | |||||||||||
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P/N | Model | Accuracy | Stand-Off | Resolution | Interface | Type | Frequency Response | Request Info | ||||
8000-6454-100 | DIGITAL D100 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | USB | 1-channel (SE) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D100 QUAD | ||||
8000-6454-110 | DIGITAL D110 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | Analog and USB | 1-channel (SE) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D110 QUAD | ||||
8000-6454-200 | DIGITAL D200 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | USB | 2-channel (SE) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D200 QUAD | ||||
8000-6454-201 | DIGITAL D201 QUAD | 0.01% FSR | Select PP Probes | up to sub-nanometer (select probes for specifications) | USB | 2-channel (PP) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D201 QUAD | ||||
8000-6454-202 | DIGITAL D202 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | USB | 2-channel (180) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D202 QUAD | ||||
8000-6454-210 | DIGITAL D210 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | Analog and USB | 2-channel (SE) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D210 QUAD | ||||
8000-6454-211 | DIGITAL D211 QUAD | 0.01% FSR | Select PP Probes | up to sub-nanometer (select probes for specifications) | Analog and USB | 2-channel (PP) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D211 QUAD | ||||
8000-6454-212 | DIGITAL D212 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | Analog and USB | 2-channel (180) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D212 QUAD | ||||
8000-6454-300 | DIGITAL D300 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | USB | 3-channel (SE) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D300 QUAD | ||||
8000-6454-310 | DIGITAL D310 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | Analog and USB | 3-channel (SE) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D310 QUAD | ||||
8000-6454-400 | DIGITAL D400 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | USB | 4-channel (SE) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D400 QUAD | ||||
8000-6454-401 | DIGITAL D401 QUAD | 0.01% FSR | Select PP Probes | up to sub-nanometer (select probes for specifications) | USB | 4-channel (PP) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D401 QUAD | ||||
8000-6454-402 | DIGITAL D402 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | USB | 4-channel (180) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D402 QUAD | ||||
8000-6454-410 | DIGITAL D410 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | Analog and USB | 4-channel (SE) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D410 QUAD | ||||
8000-6454-411 | DIGITAL D411 QUAD | 0.01% FSR | Select PP Probes | up to sub-nanometer (select probes for specifications) | Analog and USB | 4-channel (PP) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D411 QUAD | ||||
8000-6454-412 | DIGITAL D412 QUAD | 0.01% FSR | Select Capacitance Probes | up to sub-nanometer (select probes for specifications) | Analog and USB | 4-channel (180) | User Selectable 50Hz to 5kHz | Request Information on DIGITAL D412 QUAD |
Industry | Measurement Type | Applications |
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Semiconductor | Positioning | Photolithography using capacitance sensors |
Semiconductor | Positioning | Lithography Optics position focus |
Semiconductor | Thickness | LED substrate thickness |
Semiconductor | Thickness | GaAs substrate thickness measurement |
Semiconductor | Metrology | Wafer Measurement – Ungrounded |
Solar | Metrology | Wafer Bow and Warp |
Consumer Electronics | Thickness | Glass Thickness |
Consumer Electronics | Positioning | Piezo Stage |
Automotive | Distance | Spindle Run out |
Automotive | Level | Oil Film |
Automotive | Surface | Brake rotors thickness variation |
Automotive | Tolerances | Windshield Manufacturing |
Power Generation | Tolerances | Tolerances of Armature Gaps |
Research & Development | Presence/Absence | In-situ particle detection |
Automotive | Surface | Brake Rotors |
Semiconductor | Thickness | Thickness and TTV of semiconducting wafers |
Introduction to the Digital Accumeasure D400
Basic Setup
Measuring various materials
Measuring HP Printer Laser Head
Copper Foil Step Height Measurement
Push Pull Capacitance Probes for Differential Measurement
How do I determine the correct probe sensors for my application?
MTI’s New Non-Contact Hybrid Probe
Our new capacitance amplifier converts the probe capacitance directly to target gap (distance). This direct conversion approach eliminates errors that traditional analog amplifiers have due to analog filtering, linearization, range extension and the summing of channels to obtain thickness or step measurements. With the Accumeasure D series, filter frequency response, sample rate, linearization and probe range are all digitally controlled. This ensures the most accurate data capture, lossless processing and the freedom from having to purchase additional acquisition hardware.
The standard feature quadrature encoder input, provides probe positional information simultaneously with its displacement signal by synchronizing displacement measurements to the probe position to provide accurate surface profiles of various conducting and semi-conducting targets. MTI’s Digital Accumeasure capacitance displacement sensor amplifiers comes standard with 24 bit USB/Ethernet digital output. The analog output model includes the analog output in addition to the standard digital output. Both may be used simultaneously. This is ideal for closed loop applications or integration into systems that require analog.
MTI capacitance measurement system is based on the principle of parallel plate capacitor measurement. The electrical capacitance formed between a capacitance probe and a target surface varies as a function of the distance (gap) between these two surfaces. Capacitance-based measurement probes have long been employed as a means of non-contact measurement of electrically conductive materials. In a typical system, MTII’s capacitance probe acts as one of the plates and the grounded target the other plate. MTI’s amplifier converts the gap’s capacitance into an output voltage proportional to the gap. Capacitive measurements are very stable rivaling interferometer accuracy. The Capacitance is not adversely affected by temperature, humidity and pressure.
Related Products
Accessories
P/N | Image | Model | Product Description |
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8000-6925 | Power Supply | DIN mount (includes power cord and 24VDC harness) | |
8000-6887 | | Ethernet Cable | RJ45 to RJ45, 2.1 meter (7ft) |
8000-6929 | USB Interface Cable | Micro USB-Male to USB Micro USB-Male, 1 meter (3.1ft) | |
8000-6882 | | DIN Rail Section | 250mm (10inch) din rail for wall mounting power supply |
8000-6889 | | T-Connector | Synchronization adapter to daisy chain multiple systems |
8000-6888 | | Sync Cable | Cable to sync multiple systems (SMA-M to SMA-M) |
7500-6811 | | Fixture | Non-conductIve Material Fixture |