Capacitance Sensors
Accumeasure Series
Technology-driven measurement solutions for high resolution gap applications.
The Accumeasure product line offers affordable, precise measurement solutions for a wide range of environmental conditions and configurations.
The Accumeasure product line features capacitive sensor products for high-resolution gap and displacement measurements that require a high level of stable and repeatable accuracy. A capacitive sensing system consists of a probe and amplifier. Capacitive measurements can be performed in a multitude of environments using non-contact passive capacitance probes that are not affected by magnetic fields, temperature, humidity, nuclear radiation, and pressure. This is largely due to the nature of the rugged and passive capacitance probes.
Extremely high-precision and high linearity amplifiers make these systems ideal for critical measurements in X-Y stages, rotating spindles, shaft position, armature gap, disk position, and piezoelectric positioning applications. MTI engineering guarantees a highly stable, accurate, and low-noise amplifier design with an attention to fast response time.
Thousands of MTI’s products are used globally in the semiconductor, automotive, aviation, electronics, and medical industries. As the leader in capacitance technology with decades of experience, MTI stands behind the quality and performance of the most demanding user environments.
Product Comparison
Feature | Accumeasure HD | Accumeasure D | Accumeasure MicroCap | Accumeasure AS-56X | Accumeasure Wireless |
---|---|---|---|---|---|
Resolution | pm | nm | nm | μm/nm | μm |
Linearity (% FSR) | ±0.01 | ±0.01 | ±0.02 | ±0.02 | ±0.3 |
Output | Digital | Digital/Analog | Analog | Analog | Digital |
Bandwidth (Hz) | 5,000 Hz | 5,000 Hz | 5,000 Hz | 5,000 Hz | 1.5 Hz |
In Process or Desktop Solutions
A system consists of a capacitance amplifier packaged in an enclosure ideal for lab or in-process systems and a capacitance probe or probes, as several of MTI’s solutions incorporate multiple channels.
Accumeasure HD
Picometer resolution with up to 2 mm range. Accuracy to 0.01 % of full-scale range. It has built-in digitally controlled low pass cutoff filters, adjustable sample rate, and data logging features. Display your data right on your PC or HMI. USB and Ethernet ports provide digital connectivity at 100 megabit speeds. The amplifier has Digital output only as analog output would only corrupt the high-resolution data. 1-2 channels in a small compact enclosure. Only 24 VDC industrial power is needed.
Sub-micron resolution with up to 12 mm range. Accuracy to 0.01 % of the full-scale range. It has built-in digitally controlled low pass cutoff filters, adjustable sample rate, and data logging features. Display data right on your PC or HMI. USB and Ethernet ports provide digital connectivity at 100 megabit speeds. Analog outputs are also available. 1-4 channels in a small compact enclosure. Only 24 VDC industrial power is needed.
Accumeasure 9000 and 500 Rack
AS-9000 is an analog output, high-resolution, capacitance-based instrument that provides the perfect solution to many previously unattainable measurement applications. The AS-500 is a multi-channel rack system that accepts six capacitance amplifiers (AS-562-PA or AS-563-PA). They deliver nanometer-level resolution for ultra-high-precision measurements (and work with most MTI probes). The AS-9000 and AS-500 rack require the probes to have BNC connectors or SMA to BNC adapters. Both have built-in power supplies and an oscillator to drive the amplifier boards.
PCB OEM Boards for Embedded Applications
A system consists of a printed circuit board (PCB) capacitance amplifier, probe, and coax cable. The customer provides the enclosure and power supply. MTI provides the connector interface. Probes require an MCX connector or BNC, depending on the amplifier chosen.
Accumeasure MicroCap
Our smallest OEM PCB footprint. Sub-micron resolution, with up to 25 mm range. 0 to + 10-volt analog output.
Requires +/- 15 VDC analog power supply. Linearity accuracy to 0.1 % of full-scale range up to 5kHz bandwidth. The frequency response must be specified at the time of order.
Accumeasure AS-56X
Sub-micron resolution, with up to 25 mm range. 0 to + 10-volt analog output. Requires +/- 15 VDC analog power supply. Linearity accuracy to 0.05 % of full-scale range, up to 5kHz bandwidth. The frequency response must be specified at the time of order. The frequency response is set by plug-in low pass filter. Offset and gain pots for user adjustments. The Accumeasure AS-562 can also operate with ungrounded targets, typically for semiconductor wafer applications.
Probes and Probe Systems
Probes need to be mated with a capacitance amplifier. Some probes have integral leads, and others require selecting a coaxial cable assembly. MTI works with OEM clients to make custom probes meeting specific application needs.
Accumeasure Wireless
A low bandwidth solution for applications where wires are impossible. The probe requires 3V DC power which a battery can supply. Bluetooth connectivity with a remote receiver board for interface to a PLC via RS-485 serial interface. Capacitance Sensors range up to 2 mm and have a resolution of 5um. A remote receiver is included in the system.
Accumeasure Probes
MTI provides a wide range of various probe types for all the above amplifiers. They include robust stainless-steel probes with integral leads or quick disconnect coaxial connectors. We also have ultra-thin polyimide probes, PCB probes, and push-pull probes for ungrounded targets. MTI designs and manufactures probes for OEM or single sensor sales. If you don’t see what you need, contact us for a quote on a custom probe.
Gap Measurement Probes
Suitable for industrial deployment, this pre-calibrated capacitive gap sensor system provides highly accurate measurements to a grounded metal target. Capable of taking continuous or manual samples with analog or digital output for analysis or machine control. The large sample rate allows for insight into probe measurements providing an actionable data advantage. Achieve richer geometrical measurements by networking multiple probes together.
MTI capacitance measurement system is based on the principle of parallel plate capacitor measurement. The electrical capacitance formed between a capacitance probe and a target surface varies as a function of the distance (gap) between these two surfaces.
Capacitance-based measurement probes have long been employed as a means of non-contact measurement of electrically conductive materials. In a typical system, MTI’s capacitance probe acts as one of the plates and the grounded target the other plate. MTI’s amplifier converts the gap’s capacitance into an output voltage proportional to the gap. Capacitive measurements are very stable rivaling interferometer accuracy. The Capacitance sensors are not adversely affected by temperature, humidity, and pressure.
Capacitive Sensor
When engineers need to inspect their systems for any irregularities, having a capacitive sensor to identify displacements, gaps, and more can help keep in-process projects on the right path. MTI Instruments has an array of displacement sensors and capacitive devices to help your team identify problems before they worsen.
Capacitive Displacement Sensors
When you need a capacitive displacement sensor or probe to test components that find themselves in tightly packed conditions, you need a device that can deliver accurate measurements. MTI Instruments features a lineup of capacitance sensors designed to safely measure the pressure levels without touching the component itself.
You can browse our inventory of capacitive displacement sensors and find which options are right for your team today.
Gap Measurement Sensors
You need to ensure that your component pieces have the proper amount of space to operate at their fullest potential. If any gaps or clearances fall short of the desired parameters, your team needs gap measurement sensors that provide the most accurate data. We have spent years developing our capacitive sensors to be of the highest quality for various industries.
Displacement Measurement Device
Figuring out how particular parts have shifted within a given mechanism requires precision displacement sensors to get an accurate reading. With our lineup of displacement measurement devices, you can give your engineers the best tools in the business to identify if any components have shifted at any point in the process.
Our displacement sensors allow you to see how much something has shifted and its location and give your team a clearer picture of how to fix the issue.
Contact MTI Instruments to Learn More!
When you need the best capacitive sensors in the industry, MTI Instruments has the track record and the inventory you need to get the most accurate measurements possible. Our displacement sensors, thickness measurement capacitive sensors, and capacitive probes provide your team with the right equipment for the job.
In addition to our capacitive sensors, we provide our customers with the following products:
- Non-Contact Measurement Systems
- 1D Laser Systems
- Fiber Optic Systems
- Signal Simulators
- Laser Thickness Gauge System
- Thickness Measurement Capacitive Sensors
MTI capacitance measurement system is based on the principle of parallel plate capacitor measurement. The electrical capacitance formed between a capacitance probe and a target surface varies as a function of the distance (gap) between these two surfaces. Capacitance-based measurement probes have long been employed as a means of non-contact measurement of electrically conductive materials. In a typical system, MTI’s capacitance probe acts as one of the plates and the grounded target the other plate. MTI’s amplifier converts the gap’s capacitance into an output voltage proportional to the gap. Capacitive measurements are very stable rivaling interferometer accuracy. The Capacitance sensors are not adversely affected by temperature, humidity and pressure.