Manual Semiconductor Metrology System

Proforma 300i wafer thickness gauge, including for semiconductor wafers

Cost-effective alternative to full-automated wafer measurement and inspection systems

Product can provide measurement of thickness and bow of all wafer materials including Silicon, Gallium-Arsenide, Indium-Phosphide and sapphire or tape

About the Manual Semiconductor Metrology System

The Proforma 300i wafer thickness gauge is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent electrical ground resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating software and Ethernet network interface capability.

*Gallium-Arsenide requires probe reconfiguration for semi-insulating materials over 10K-Ohm cm bulk resistance.

Would you like to contact MTI Instruments directly to learn more?

Product Inquiry v201802
Your Product of Interest: , model .
By clicking "Submit" you agree to allow MTI Instruments to contact you about your request. (Please read our Privacy Policy for how MTI handles your data.)

Accessories

P/N Image Model Product Description
8000-6563 base rings Base Rings 50.8mm (2″) Base rings are required for BOW measurements
8000-6552 base rings Base Rings 76.2mm (3″) Base rings are required for BOW measurements
8000-6548 base rings Base Rings 100mm (4″) Base rings are required for BOW measurements
8000-6553 base rings Base Rings 125mm (5″) Base rings are required for BOW measurements
8000-6564 base rings Base Rings 152.4mm (6″) Base rings are required for BOW measurements
8000-6565 base rings Base Rings 203.25mm (8″) Base rings are required for BOW measurements
2000-2000 photo not available Calibration Standard Silicon (Si) wafer

Related Products

Looking for similar or complementary products? Browse the following products.

We make every effort, if feasible, to maintain, service and support  our legacy products.